Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9640396 | Spin-on spacer materials for double- and triple-patterning lithography | Qin Lin, Rama Puligadda, James Claypool, Douglas J. Guerrero | 2017-05-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9640396 | Spin-on spacer materials for double- and triple-patterning lithography | Qin Lin, Rama Puligadda, James Claypool, Douglas J. Guerrero | 2017-05-02 |