Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9638999 | Dual-layer light-sensitive developer-soluble bottom anti-reflective coatings for 193-nm lithography | Jim D. Meador, Douglas J. Guerrero | 2017-05-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9638999 | Dual-layer light-sensitive developer-soluble bottom anti-reflective coatings for 193-nm lithography | Jim D. Meador, Douglas J. Guerrero | 2017-05-02 |