Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9835957 | Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method | Martijn Houben, Alwin De Kock, Marco Adrianus Peter Van Den Heuvel | 2017-12-05 |
| 9740110 | Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method | Johan Gertrudis Cornelis Kunnen, Martijn Houben, Thibault Simon Mathieu Laurent, Armand Rosa Jozef Dassen, Sander Catharina Reinier Derks | 2017-08-22 |
| 9575419 | Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method | Johan Gertrudis Cornelis Kunnen, Martijn Houben, Thibault Simon Mathieu Laurent, Armand Rosa Jozef Dassen, Sander Catharina Reinier Derks | 2017-02-21 |