Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9740110 | Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method | Johan Gertrudis Cornelis Kunnen, Martijn Houben, Thibault Simon Mathieu Laurent, Hendrikus Johannes Marinus Van Abeelen, Sander Catharina Reinier Derks | 2017-08-22 |
| 9575419 | Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method | Johan Gertrudis Cornelis Kunnen, Martijn Houben, Thibault Simon Mathieu Laurent, Hendrikus Johannes Marinus Van Abeelen, Sander Catharina Reinier Derks | 2017-02-21 |