Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9753377 | Deformation pattern recognition method, pattern transferring method, processing device monitoring method, and lithographic apparatus | Irina Lyulina, Manfred Gawein Tenner, Richard Johannes Franciscus Van Haren, Stefan Cornelis Theodorus Van Der Sanden | 2017-09-05 |