Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9574268 | Pulsed valve manifold for atomic layer deposition | Todd Robert Dunn, Carl Louis White, Mike Halpin, Eric James Shero, Herbert Terhorst | 2017-02-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9574268 | Pulsed valve manifold for atomic layer deposition | Todd Robert Dunn, Carl Louis White, Mike Halpin, Eric James Shero, Herbert Terhorst | 2017-02-21 |