Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9593416 | Precursor delivery system | Kyle Fondurulia, Eric James Shero, Mohith Verghese | 2017-03-14 |
| 9574268 | Pulsed valve manifold for atomic layer deposition | Todd Robert Dunn, Mike Halpin, Eric James Shero, Herbert Terhorst, Jerry Winkler | 2017-02-21 |