Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9739722 | Reflective mask blank for EUV lithography, and process for its inspection and process for its production | Hiroshi Nakanishi, Junichi Kageyama | 2017-08-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9739722 | Reflective mask blank for EUV lithography, and process for its inspection and process for its production | Hiroshi Nakanishi, Junichi Kageyama | 2017-08-22 |