Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9852903 | System and method in indium-gallium-arsenide channel height control for sub 7nm FinFET | Chun YAN | 2017-12-26 |
| 9805914 | Methods for removing contamination from surfaces in substrate processing systems | Chun YAN, Jim Zhongyi He, Teng-Fang Kuo, Zhenwen Ding, Adam Lane | 2017-10-31 |
| 9799737 | Method for forming group III/V conformal layers on silicon substrates | Errol Antonio C. Sanchez, David K. Carlson, Zhiyuan Ye | 2017-10-24 |
| 9752224 | Structure for relaxed SiGe buffers including method and apparatus for forming | Zhiyuan Ye, Errol Antonio C. Sanchez, Keun-Yong Ban | 2017-09-05 |
| 9653282 | Silicon-containing substrate cleaning procedure | Chun YAN, Melitta Hon | 2017-05-16 |
| 9653291 | Method for removing native oxide and residue from a III-V group containing surface | Chun YAN | 2017-05-16 |