Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9805914 | Methods for removing contamination from surfaces in substrate processing systems | Chun YAN, Xinyu BAO, Teng-Fang Kuo, Zhenwen Ding, Adam Lane | 2017-10-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9805914 | Methods for removing contamination from surfaces in substrate processing systems | Chun YAN, Xinyu BAO, Teng-Fang Kuo, Zhenwen Ding, Adam Lane | 2017-10-31 |