Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9812344 | Wafer processing system with chuck assembly maintenance module | Jason Rye, Mario David Silvetti, Randy Harris, Bryan Puch, Satish Sundar | 2017-11-07 |
| 9714462 | Vacuum pre-wetting apparatus and methods | Robert B. Moore | 2017-07-25 |