Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9812344 | Wafer processing system with chuck assembly maintenance module | Jason Rye, Randy Harris, Bryan Puch, Vincent Steffan Francischetti, Satish Sundar | 2017-11-07 |
| 9646859 | Disk-brush cleaner module with fluid jet | Hui Chen, Allen L. D'Ambra, Sen-Hou Ko, Yufei Chen, Adrian Blank +2 more | 2017-05-09 |