Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9534294 | Cleaning method for thin-film processing applications and apparatus for use therein | Florian RIES, Stefan Hein, Stefan Lorenz, Neil MORRISON | 2017-01-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9534294 | Cleaning method for thin-film processing applications and apparatus for use therein | Florian RIES, Stefan Hein, Stefan Lorenz, Neil MORRISON | 2017-01-03 |