Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 9534294 | Cleaning method for thin-film processing applications and apparatus for use therein | Stefan Hein, Stefan Lorenz, Neil MORRISON, Tobias Stolley | 2017-01-03 | $13,194,000 |