Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9305476 | Chemical mechanical polishing (CMP) composition for shallow trench isolation (STI) applications and methods of making thereof | Xiaobo Shi, Hongjun Zhou, Daniel Hernandez Castillo, II, Jae-ouk Choo, James Allen Schlueter +6 more | 2016-04-05 |