Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530655 | Slurry composition for chemical mechanical polishing of Ge-based materials and devices | Chia-Jung Hsu, Neng-Kuo Chen, Song-Yuan Chang, Teng-Chun Tsai | 2016-12-27 |
| 9493678 | Polishing composition | Chun-Chieh Lee, Song-Yuan Chang, Ming-Hui Lu, Ming-Che Ho | 2016-11-15 |
| 9416297 | Chemical mechanical polishing method using slurry composition containing N-oxide compound | Chia-Jung Hsu, Neng-Kuo Chen, Wen-Feng Chueh, Sey-Ping Sun, Song-Yuan Chang | 2016-08-16 |