Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9323219 | Method of microlithography with the use of divergent/convergent beams for holographic restoration of an image | — | 2016-04-26 |
| 9310768 | Method for synthesis and formation of a digital hologram for use in microlithography | Mikhail Borisov, Aleksey Shamaev, Dmitry Chelyubeev, Aleksandr Gavrikov, Vitaly Chernik +1 more | 2016-04-12 |