Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9310768 | Method for synthesis and formation of a digital hologram for use in microlithography | Vadim Rakhovsky, Mikhail Borisov, Aleksey Shamaev, Dmitry Chelyubeev, Vitaly Chernik +1 more | 2016-04-12 |