| 9484263 |
Method of removing a hard mask on a gate |
Chao-Hung Lin, Li-Wei Feng, Shih-Hung Tsai, Jyh-Shyang Jenq, Yi-Wen Chen +1 more |
2016-11-01 |
| 9466521 |
Semiconductor device having a patterned metal layer embedded in an interlayer dielectric layer |
Chih-Sen Huang, Ching-Wen Hung, Jia-Rong Wu, Tsung-Hung Chang, Yi-Hui Lee +1 more |
2016-10-11 |
| 9324610 |
Method for fabricating semiconductor device |
Ching-Wen Hung, Jia-Rong Wu, Tsung-Hung Chang, Yi-Hui Lee, Chih-Sen Huang +2 more |
2016-04-26 |
| 9312121 |
Method for cleaning contact hole and forming contact plug therein |
Yi-Hui Lee, Tsung-Hung Chang, Ching-Wen Hung, Jia-Rong Wu, Chih-Sen Huang +4 more |
2016-04-12 |
| 9312356 |
Semiconductor device and manufacturing method thereof |
Chih-Sen Huang, Yi-Wen Chen |
2016-04-12 |
| 9306032 |
Method of forming self-aligned metal gate structure in a replacement gate process using tapered interlayer dielectric |
Chih-Sen Huang, Po-Chao Tsao, Ching-Wen Hung, Jia-Rong Wu, Chien-Ting Lin |
2016-04-05 |
| 9281374 |
Metal gate structure and fabrication method thereof |
Tsun-Min Cheng, Min-Chuan Tsai, Chih-Chien Liu, Jen-Chieh Lin, Pei-Ying Li +2 more |
2016-03-08 |
| 9263540 |
Metal gate structure |
Chih-Sen Huang, Shih-Fang Tzou, Chien-Ting Lin, Yi-Wei Chen, Shi-Xiong Lin +5 more |
2016-02-16 |
| 9263392 |
Semiconductor device and method for fabricating the same |
Chih-Sen Huang, Ching-Wen Hung, Jia-Rong Wu, Tsung-Hung Chang, Yi-Hui Lee +1 more |
2016-02-16 |