Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9482964 | Overlap mark set and method for selecting recipe of measuring overlap error | En-Chiuan Liou, Yi-Ting Chen, Teng-Chin Kuo, Chun-Chi Yu | 2016-11-01 |
| 9400435 | Method of correcting overlay error | En-Chiuan Liou, Teng-Chin Kuo, Chia-Hung Wang, Tuan-Yen Yu, Yuan-Chi Pai +1 more | 2016-07-26 |
| 9318338 | Method for fabricating semiconductor device | Bor-Shyang Liao, Tsung-Hsun Tsai, Kuo-Chih Lai, Pin-Hong Chen, Shu Min Huang +2 more | 2016-04-19 |
| 9312121 | Method for cleaning contact hole and forming contact plug therein | Yi-Hui Lee, Tsung-Hung Chang, Ching-Wen Hung, Jia-Rong Wu, Ching-Ling Lin +4 more | 2016-04-12 |
| 9230816 | Method for fabricating semiconductor device | Ching-Wen Hung, Jia-Rong Wu, Chih-Sen Huang, Yi-Wei Chen | 2016-01-05 |