Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9401278 | Apparatus and methods for improving the intensity profile of a beam image used to process a substrate | Andrew M. Hawryluk, Boris Grek | 2016-07-26 |
| 9329484 | Apparatus and method of direct writing with photons beyond the diffraction limit using two-color resist | John S. Petersen | 2016-05-03 |
| 9304410 | Apparatus and method of direct writing with photons beyond the diffraction limit | Rudolf H. Hendel, John S. Petersen, Hwan J. Jeong | 2016-04-05 |
| 9250509 | Optical projection array exposure system | Thomas Laidig, Jeffrey Kaskey, Jang Fung Chen | 2016-02-02 |