Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9401278 | Apparatus and methods for improving the intensity profile of a beam image used to process a substrate | Andrew M. Hawryluk, David A. Markle | 2016-07-26 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9401278 | Apparatus and methods for improving the intensity profile of a beam image used to process a substrate | Andrew M. Hawryluk, David A. Markle | 2016-07-26 |