Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9514914 | Shot data generation method and multi charged particle beam writing method | — | 2016-12-06 |
| 9269532 | Charged particle beam writing apparatus, and method for detecting irregularities in dose of charged particle beam | Hironori Mizoguchi | 2016-02-23 |