Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9508528 | Method for correcting drift of accelerating voltage, method for correcting drift of charged particle beam, and charged particle beam writing apparatus | — | 2016-11-29 |
| 9269532 | Charged particle beam writing apparatus, and method for detecting irregularities in dose of charged particle beam | Hideo Inoue | 2016-02-23 |