Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9362106 | Substrate processing method, substrate processing apparatus, and storage medium | Hayato Iwamoto, Yoshiya Hagimoto, Tomoki Tetsuka, Shinichiro Shimomura, Teruomi Minami +3 more | 2016-06-07 |
| 9321085 | Substrate processing method, storage medium storing computer program for implementing substrate processing method and substrate processing apparatus | Teruomi Minami, Satoru Tanaka, Tatsuya Nagamatsu, Hiroyuki Suzuki, Tsukasa Hirayama +1 more | 2016-04-26 |