Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9362106 | Substrate processing method, substrate processing apparatus, and storage medium | Hayato Iwamoto, Yoshiya Hagimoto, Tomoki Tetsuka, Teruomi Minami, Hiroki Sakurai +3 more | 2016-06-07 |
| 9278768 | Process liquid changing method and substrate processing apparatus | Masatoshi Kasahara | 2016-03-08 |