Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9343349 | Substrate holding apparatus and substrate holding method | Osamu Hirakawa, Eiji Manabe, Takeshi Tamura, Akira Fukutomi | 2016-05-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9343349 | Substrate holding apparatus and substrate holding method | Osamu Hirakawa, Eiji Manabe, Takeshi Tamura, Akira Fukutomi | 2016-05-17 |