Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9343349 | Substrate holding apparatus and substrate holding method | Yasuharu Iwashita, Eiji Manabe, Takeshi Tamura, Akira Fukutomi | 2016-05-17 |
| 9330898 | Separation system, separation method, program and computer storage medium | Naoto Yoshitaka, Masataka Matsunaga, Norihiko Okamoto | 2016-05-03 |
| 9296350 | Ultrasonic wave device | Yasushi Nagano, Takashi Tsuji | 2016-03-29 |