Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9355442 | Film thickness measurement apparatus, film thickness measurement method, and non-transitory computer storage medium | Tadashi Nishiyama, Kanzou Katou | 2016-05-31 |
| 9342880 | Defect analyzing apparatus, substrate processing system, defect analyzing method and computer-readable storage medium | Tadashi Nishiyama, Hiroshi Tomita, Izumi Hasegawa | 2016-05-17 |
| 9229337 | Setting method of exposure apparatus, substrate imaging apparatus and non-transitory computer-readable storage medium | Shinobu Miyazaki, Hiroshi Tomita | 2016-01-05 |