Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9229337 | Setting method of exposure apparatus, substrate imaging apparatus and non-transitory computer-readable storage medium | Hiroshi Tomita, Shuji Iwanaga | 2016-01-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9229337 | Setting method of exposure apparatus, substrate imaging apparatus and non-transitory computer-readable storage medium | Hiroshi Tomita, Shuji Iwanaga | 2016-01-05 |