Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9443749 | Vacuum processing apparatus | Sensho Kobayashi | 2016-09-13 |
| 9389607 | Method for setting substrate-treatment time, and storage medium | — | 2016-07-12 |
| 9330950 | Substrate processing apparatus | — | 2016-05-03 |
| 9269599 | Substrate relay apparatus, substrate relay method, and substrate processing apparatus | — | 2016-02-23 |