Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9443749 | Vacuum processing apparatus | Shinji Wakabayashi | 2016-09-13 |
| 9228685 | Load lock device | Keita Kumagai | 2016-01-05 |
| 9230842 | Substrate processing apparatus | — | 2016-01-05 |
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9443749 | Vacuum processing apparatus | Shinji Wakabayashi | 2016-09-13 |
| 9228685 | Load lock device | Keita Kumagai | 2016-01-05 |
| 9230842 | Substrate processing apparatus | — | 2016-01-05 |