Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9523711 | Probe apparatus and wafer mounting table for probe apparatus | Kazuya Yano, Eiji Hayashi | 2016-12-20 |
| 9261553 | Probe apparatus | Eiichi Shinohara, Isamu Inomata, Kazuya Yano, Yoshiyasu Kato | 2016-02-16 |