Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9524847 | Substrate processing apparatus | Nobuhiro Wada, Makoto Kobayashi, Hiroshi Tsujimoto, Jun Tamura, Jun Oyabu | 2016-12-20 |
| 9455125 | Substrate processing apparatus | Akihiro Yoshimura, Tetsuji Sato, Masato Horiguchi, Nobuhiro Wada, Makoto Kobayashi +2 more | 2016-09-27 |