Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9449838 | Semiconductor device manufacturing method | Kazuki Narishige, Takanori Sato | 2016-09-20 |
| 9396960 | Plasma processing method and plasma processing apparatus | Akira Nakagawa, Hideki Konishi | 2016-07-19 |