Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9449838 | Semiconductor device manufacturing method | Kazuto Ogawa, Takanori Sato | 2016-09-20 |
| 9412617 | Plasma processing method and plasma processing apparatus | Takanori Sato, Manabu Sato | 2016-08-09 |
| 9384992 | Plasma processing method | Takanori Sato, Manabu Sato | 2016-07-05 |
| 9355861 | Semiconductor device manufacturing method and computer-readable storage medium | Manabu Sato, Takanori Sato | 2016-05-31 |
| 9337056 | Semiconductor device manufacturing method | Rui Takahashi, Ryuuu Ishita | 2016-05-10 |