Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520270 | Direct current superposition curing for resist reflow temperature enhancement | Nihar Mohanty, Chi-Chun Liu | 2016-12-13 |
| 9443731 | Material processing to achieve sub-10nm patterning | David L. O'Meara, Angelique Raley, Kiyohito Ito | 2016-09-13 |
| 9257280 | Mitigation of asymmetrical profile in self aligned patterning etch | Angelique Raley, Kiyohito Ito | 2016-02-09 |