Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9494855 | Lithography-oriented photomask repair | — | 2016-11-15 |
| 9400424 | Method of repairing a mask | Fu-Sheng Chu | 2016-07-26 |
| 9395632 | Efficient solution for removing EUV native defects | Yen-Kai Huang, Hsun-Chuan Shih | 2016-07-19 |
| 9298085 | Method for repairing a mask | Hsun-Chuan Shih | 2016-03-29 |
| 9291890 | Method for repairing a mask | Yen-Kai Huang | 2016-03-22 |
| 9274417 | Method for lithography patterning | Hsun-Chuan Shih | 2016-03-01 |