Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9395632 | Efficient solution for removing EUV native defects | Yen-Kai Huang, Yuan-Chih Chu | 2016-07-19 |
| 9298085 | Method for repairing a mask | Yuan-Chih Chu | 2016-03-29 |
| 9274417 | Method for lithography patterning | Yuan-Chih Chu | 2016-03-01 |