Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9494261 | Chemical dispense system with reduced contamination | Rong Pan, Yung-Long Chen, Heng-Yi Tzeng, Chih-Chiang Tseng | 2016-11-15 |
| 9478444 | Mechanisms for cleaning wafer and scrubber | Tai-Liang Lyu, Tzu-Yang Chung, Chia-Ming Tai, Chao-Hui Kuo | 2016-10-25 |
| 9349617 | Mechanisms for wafer cleaning | Shang-Yuan Yu, Chien-Wen Hsiao, Hong-Jie Xu, Jui-Chuan Chang, Wen-Chang Tsai | 2016-05-24 |
| 9263337 | Semiconductor device and method of manufacture | Chun-Li Chou, Chi-Yun Tseng, Yu-Yen Hsu, Tsai-Pao Su, Hobin Chen +1 more | 2016-02-16 |