Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9349617 | Mechanisms for wafer cleaning | Shang-Yuan Yu, Shao-Yen Ku, Hong-Jie Xu, Jui-Chuan Chang, Wen-Chang Tsai | 2016-05-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9349617 | Mechanisms for wafer cleaning | Shang-Yuan Yu, Shao-Yen Ku, Hong-Jie Xu, Jui-Chuan Chang, Wen-Chang Tsai | 2016-05-24 |