Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9389520 | System and method for lithography with leveling sensor | — | 2016-07-12 |
| 9360767 | Method and apparatus for maintaining depth of focus | Chang-Tsun Hsieh, Chih-Ming Ke, Fu-Jye Liang, Tzung-Chi Fu | 2016-06-07 |
| 9360778 | System and method for lithography patterning | Fu-Jye Liang, Hsueh-Hung Wu | 2016-06-07 |