Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9418199 | Method and apparatus for extracting systematic defects | Jia-Rui Hu, Hua-Tai Lin, Kai-Hsiung Chen, Tsai-Sheng Gau | 2016-08-16 |
| 9360767 | Method and apparatus for maintaining depth of focus | Chang-Tsun Hsieh, Fu-Jye Liang, Li-Jui Chen, Tzung-Chi Fu | 2016-06-07 |
| RE45943 | Measurement of overlay offset in semiconductor processing | Te-Chih Huang, Tsai-Sheng Gau | 2016-03-22 |