Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9517539 | Wafer susceptor with improved thermal characteristics | Yi-Hung Lin, Chang-Shen Lu, Tze-Liang Lee, Chii-Horng Li | 2016-12-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9517539 | Wafer susceptor with improved thermal characteristics | Yi-Hung Lin, Chang-Shen Lu, Tze-Liang Lee, Chii-Horng Li | 2016-12-13 |