Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9425077 | Semiconductor apparatus with transportable edge ring for substrate transport | Chih-Chang Hsieh, Yung-Kai Lin, Hsu-Shui Liu, Kai-Szu Lo, Chih-Ping Chen +3 more | 2016-08-23 |