Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9425077 | Semiconductor apparatus with transportable edge ring for substrate transport | Chih-Chang Hsieh, Yung-Kai Lin, Hsu-Shui Liu, Kai-Szu Lo, Chian-kun Chan +3 more | 2016-08-23 |
| 9419010 | High aspect ratio etching method | Yen-Hao Shih, Sheng-Chih Lai | 2016-08-16 |
| 9252156 | Conductor structure and method | Yen-Hao Shih, Yi-Hsuan Hsiao | 2016-02-02 |