Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9395411 | Method for testing a test substrate under defined thermal conditions and thermally conditionable prober | Joerg Kiesewetter, Michael Teich, Karsten Stoll, Axel Schmidt | 2016-07-19 |
| 9373533 | Systems and methods for providing wafer access in a wafer processing system | Frank Fehrmann, Botho Hirschfeld | 2016-06-21 |