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Home › 2016 › Cascade Microtech › Botho Hirschfeld

Botho Hirschfeld — 2 Patents in 2016

CMCascade Microtech: 2 patents #2 of 26Top 8%

Dresden, DE: #48 of 369 inventorsTop 15%

Overall (2016): #156,815 of 481,213Top 35%

2 Patents 2016

Issued Patents 2016

Showing 1–2 of 2 patents

Patent #	Title	Co-Inventors	Date	Approx Value ⓘ
9377423	Systems and methods for handling substrates at below dew point temperatures	Axel Becker	2016-06-28
9373533	Systems and methods for providing wafer access in a wafer processing system	Frank Fehrmann, Stojan Kanev	2016-06-21	$1,812,000

Botho Hirschfeld — 2 Patents in 2016

Issued Patents 2016

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