Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9377423 | Systems and methods for handling substrates at below dew point temperatures | Axel Becker | 2016-06-28 |
| 9373533 | Systems and methods for providing wafer access in a wafer processing system | Frank Fehrmann, Stojan Kanev | 2016-06-21 |