Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9411914 | Simulator, processing system, damage evaluation method and damage evaluation program | Nobuyuki Kuboi | 2016-08-09 |
| 9287097 | Predicting ultraviolet ray damage with visible wavelength spectroscopy during a semiconductor manufacturing process | Nobuyuki Kuboi, Masanaga Fukasawa | 2016-03-15 |