Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9425142 | Semiconductor device and manufacturing method of the same | — | 2016-08-23 |
| 9293411 | Semiconductor device and manufacturing method of the same | — | 2016-03-22 |
| 9287097 | Predicting ultraviolet ray damage with visible wavelength spectroscopy during a semiconductor manufacturing process | Nobuyuki Kuboi, Tetsuya Tatsumi | 2016-03-15 |